INTERFEROMETRIC SYSTEM AND METHOD FOR ADJUSTING A PATH DIFFERENCE

An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEIFFERT THOMAS, FLEISCHER MATTHIAS
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!