INTERFEROMETRIC SYSTEM AND METHOD FOR ADJUSTING A PATH DIFFERENCE

INTERFEROMETRIC SYSTEM AND METHOD FOR ADJUSTING A PATH DIFFERENCE

An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an a...

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Hauptverfasser: SEIFFERT THOMAS, FLEISCHER MATTHIAS
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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creator SEIFFERT THOMAS
FLEISCHER MATTHIAS
description An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an adjusting arrangement for adjusting a path difference between the measuring beams and the reference beams, and a having a detector for recording images of the superposition of the reference beams and the measuring beams reflected by the measured object. According to the present system, a synchronization arrangement is used to control the adjusting arrangement so that the path difference between the measuring beams and the reference beams is adjusted in synchronization with the images recorded by the detector. The present system also relates to a method for adjusting a path difference.
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title INTERFEROMETRIC SYSTEM AND METHOD FOR ADJUSTING A PATH DIFFERENCE
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