Nanopillar E-Fuse Structure and Process

Techniques for incorporating nanotechnology into electronic fuse (e-fuse) designs are provided. In one aspect, an e-fuse structure is provided. The e-fuse structure includes a first electrode; a dielectric layer on the first electrode having a plurality of nanochannels therein; an array of metal sil...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GUO DECHAO, CHAKRAVARTI SATYA N, WONG KEITH KWONG HON, BU HUIMING
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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