METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS

The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produ...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAUDREVANGE DOMINIK MARCEL, NEFF JAKOB WILLI, ZINK PETER
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS TESTING X-RAY TECHNIQUE
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