THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DEVICE

The present invention provides a thermal type mass flow meter and a thermal type mass flow control device which can lower a measurement error caused by an influence of a thermal siphon phenomenon so as to intend to improve a flow rate measurement precision while it is possible to construct a whole c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EBI HIROYUKI, SHIMIZU TETSUO, MORIYA SHUJI, KITAGAWA HITOSHI, OKABE TSUNEYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROLLING MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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