Spin Coating Modeling

A method for setting processing parameters for fabricating an integrated circuit, by creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where the mathematical model includes, a smoothing algorithm, where the smoothing algorithm uses as inputs only...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROBERTSON STEWART A, GRAVES JOHN S, SMITH MARK D
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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