PROCESSING OF CHLOROSILANE FLOWS CONTAINING BORON

The invention relates to a method for yielding boron-depleted chlorosilanes from a chlorosilane mixture containing boron by means of separation by distillation of a boron-enriched distillation flow. The invention further relate to a device for yielding boron-depleted chlorosilanes from a chlorosilan...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RAULEDER HARTWIG, PAULI INGO, SCHWARZ DOROTHEA, SCHWARZ CHRISTOPH, SEILER HARALD, NELTE ANDREAS
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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