3D CHANNEL ARCHITECTURE FOR SEMICONDUCTOR DEVICES

Semiconductor devices and methods for making such devices that contain a 3D channel architecture are described. The 3D channel architecture is formed using a dual trench structure containing with a plurality of lower trenches extending in an x and y directional channels and separated by a mesa and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HO IHSIU, KINZER DAN, CHALLA ASHOK, JO SEOKJIN, KIM SUKU, SAPP STEVEN, CALAFUT DAN, LARSEN MARK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!