METAL PATTERNING FOR ELECTRICALLY CONDUCTIVE STRUCTURES BASED ON ALLOY FORMATION

Layered metal structures are patterned to form a surface with some locations having an alloy along the top surface at some locations and the original top metal layer at other locations along the surface. The alloy and original top metal layer can be selected to have differential etching properties s...

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Bibliographische Detailangaben
Hauptverfasser: PAKALA NEERAJ, SANDERS WILLIAM A, SRINIVASAN UMA, HIESLMAIR HENRY
Format: Patent
Sprache:eng
Schlagworte:
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