IMMERSION LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

An immersion lithographic apparatus has a surface that in use is contacted by the immersion liquid and the surface has a surface roughness Ra that is less than or equal to 0.2 μm. Immersion liquid on the surface may have a contact angle of 60° or greater. The surface may be able to maintain its prop...

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Bibliographische Detailangaben
Hauptverfasser: ELISSEEVA OLGA VLADIMIROVNA, DZIOMKINA NINA VLADIMIROVNA
Format: Patent
Sprache:eng
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