Methods of Operating Microvalve Assemblies and Related Structures and Related Devices

A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a t...

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Hauptverfasser: DOUGLAS KEVIN R, DAUSCH DAVID E, GIBSON PAUL W, GOODWIN SCOTT H, TEACH WILLIAM O, DETTLOFF WAYNE D, HARRIS DONALD C
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creator DOUGLAS KEVIN R
DAUSCH DAVID E
GIBSON PAUL W
GOODWIN SCOTT H
TEACH WILLIAM O
DETTLOFF WAYNE D
HARRIS DONALD C
description A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
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subjects ACTUATING-FLOATS
BLASTING
COCKS
CONTROLLING
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES
FLUID-PRESSURE ACTUATORS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HEATING
HYDRAULICS OR PNEUMATICS IN GENERAL
LIGHTING
MECHANICAL ENGINEERING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TAPS
TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
title Methods of Operating Microvalve Assemblies and Related Structures and Related Devices
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