DEPOSITION OF CHALCOGENIDE MATERIALS VIA VAPORIZATION PROCESS

A method of depositing a chalcogenide material. The method includes forming a condensed phase chalcogenide source material on a deposition surface, capping the deposition surface, vaporizing the chalcogenide source material, and subsequently forming a product chalcogenide material on the deposition...

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Bibliographische Detailangaben

1. Verfasser:	CZUBATYJ WOLODYMYR
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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