MEMBER WITH A CLEANING SURFACE AND A METHOD OF REMOVING CONTAMINATION

A member with a cleaning surface for use in capturing particles in a lithographic apparatus is disclosed. The particles are captured by a plurality of projections which are arranged in a pattern. A sensor can be used to detect contaminant particles in the pattern.

Bibliographische Detailangaben

Hauptverfasser:	PUTZ MARIO, BOEREMA MARK DREWES, RUHM MATTHIAS, VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY CLEANING CLEANING IN GENERAL ELECTROGRAPHY HOLOGRAPHY PERFORMING OPERATIONS PHOTOGRAPHY PHYSICS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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