VISION SYSTEM FOR POSITIONING A BONDING TOOL

An apparatus for correcting a positional offset of a bonding tool during bonding operations comprises a first fiducial mark and a second fiducial mark spaced from the first fiducial mark located on the bonding tool. A first imaging path emanates from the first fiducial mark and a second imaging path...

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Bibliographische Detailangaben
Hauptverfasser: FUNG KA FAI, MOK CHI LEUNG VINCENT, FUNG SHUN MING KENNETH, LEUNG WING HONG, CHUNG KWOK KEE
Format: Patent
Sprache:eng
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