Modular Chambers for Manufacturing Magnetic Disks

A modular chamber design for manufacturing magnetic disks is provided. The modular chambers are linearly aligned, have a trapezoidal shape, and are inversely oriented. In this inverse orientation, a chamber can be exchanged and/or removed without first having to laterally move the other chambers to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SMURA MARK, MCLEOD PAUL STEPHEN
Format: Patent
Sprache:eng
Schlagworte:
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