Dielectric mesh isolated phase change structure for phase change memory

A method for manufacturing a memory device, and a resulting device, is described using silicon oxide doped chalcogenide material. A first electrode having a contact surface; a body of phase change memory material in a polycrystalline state including a portion in contact with the contact surface of t...

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Hauptverfasser: CHEN CHIEH FANG, BREITWISCH MATTHEW J, FLAITZ PHILIP, LUNG HSIANG-LAN, LEE MING HSIU, BAUMANN FRIEDER H, LAM CHUNG HON, SHIH YEN-HAO, RAOUX SIMONE
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creator CHEN CHIEH FANG
BREITWISCH MATTHEW J
FLAITZ PHILIP
LUNG HSIANG-LAN
LEE MING HSIU
BAUMANN FRIEDER H
LAM CHUNG HON
SHIH YEN-HAO
RAOUX SIMONE
description A method for manufacturing a memory device, and a resulting device, is described using silicon oxide doped chalcogenide material. A first electrode having a contact surface; a body of phase change memory material in a polycrystalline state including a portion in contact with the contact surface of the first electrode, and a second electrode in contact with the body of phase change material are formed. The process includes melting and cooling the phase change memory material one or more times within an active region in the body of phase change material without disturbing the polycrystalline state outside the active region. A mesh of silicon oxide in the active region with at least one domain of chalcogenide material results. Also, the grain size of the phase change material in the polycrystalline state outside the active region is small, resulting in a more uniform structure.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Dielectric mesh isolated phase change structure for phase change memory
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