POSITIONING APPARATUS

A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DE FOCKERT GEORGE ARIE JAN, HOEKSTRA PETER, ANGELIS GEORGO ZORZ
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1, SM2)-A controller (6) receiving both scanner output signals is capable to uniquely calculate the position (X) of the platform with respect to the frame in a measuring range (MR) that is larger than the largest of said two pitches (P1; P2).