POSITIONING APPARATUS
A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1, SM2)-A controller (6) receiving both scanner output signals is capable to uniquely calculate the position (X) of the platform with respect to the frame in a measuring range (MR) that is larger than the largest of said two pitches (P1; P2). |
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