APPARATUS FOR UNIFORMLY GENERATING ATMOSPHERIC PRESSURE PLASMA

APPARATUS FOR UNIFORMLY GENERATING ATMOSPHERIC PRESSURE PLASMA

An atmospheric pressure plasma generation apparatus is provided for generating plasma at the atmospheric pressure with stable voltage supply. A plasma generation apparatus of the preset invention includes a first conductor arranged to face a workpiece and having a power plate through power is applie...

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1. Verfasser: KANG BANG KWON
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Sprache:eng
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ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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description An atmospheric pressure plasma generation apparatus is provided for generating plasma at the atmospheric pressure with stable voltage supply. A plasma generation apparatus of the preset invention includes a first conductor arranged to face a workpiece and having a power plate through power is applied; a second conductor arranged oppositely to a surface facing the workpiece along the first conductor for define a discharge space; and a gas supply unit having a gas supply passage for guiding gas to the discharge space and supporting the first and second conductors. The atmospheric plasma generation apparatus of the present invention is advantageous since the plasma can be uniformly generated in stable manner at an atmospheric pressure on the basis of a stable voltage supply.
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subjects ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
title APPARATUS FOR UNIFORMLY GENERATING ATMOSPHERIC PRESSURE PLASMA
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