Substrate firing device

A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JUNG WON-WOONG, SHIN HYUNUL
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MECHANICAL ENGINEERING OPEN SINTERING OR LIKE APPARATUS OVENS RANGES RETORTS VENTILATING WEAPONS
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