MEASURING SCANNING PROBE FOR SCANNING A SURFACE TO BE MEASURED

A measuring scanning probe for scanning a surface to be measured, including a stylus so as to provide a measuring point at a first end of the stylus for scanning the surface to be measured and a base part that is to be fixedly connected to a scanning device. The stylus is movably suspended from the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BURGER GERARDUS JOHANNES, BOS EDWIN JOHANNES CORNELIS
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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