SLM Calibration

Apparatus and methods are used to calibrate an array of individually controllable elements within a lithographic apparatus. A calibration unit can switch between a first state in which the modulated beam of radiation passes into a projection system for projecting the modulated beam of radiation onto...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KRUIZINGA BORGERT, HOEKS MARTINUS HENDRICUS HENDRICUS, VAN HIMBERGEN HAR, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, VANNEER ROELAND NICOLAAS MARIA, VAN ZWET ERWIN JOHN, VISSER HUIBERT, MEIJERINK MARCUS GERHARDUS HENDRIKUS, STREEFKERK BOB, VAN DER VALK NICOLAAS CORNELIS JOHANNES
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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