Temperature and pressure control methods to fill features with programmable resistance and switching devices

A programmable resistance, chalcogenide, switching or phase-change material device includes a substrate with a plurality of stacked layers including a conducting bottom electrode layer, an insulative layer having an opening formed therein, an active material layer deposited over both the insulative...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FOURNIER JEFF, LOWREY TYLER, CZUBATYJ WOLODYMYR
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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