METHODS AND TOOLS FOR CONTROLLING THE REMOVAL OF MATERIAL FROM MICROFEATURE WORKPIECES

Methods and apparatus for controlling the removal of material from microfeature workpieces in abrasive removal processes. An embodiment of such a method comprises irradiating a periodic structure of the workpiece and obtaining an intensity distribution of radiation returning from the periodic struct...

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Bibliographische Detailangaben

Hauptverfasser:	CHANDRASEKARAN NAGASUBRAMANIYAN, KOTHARI RAJSHREE, SABDE GUNDU M, HOFMANN JAMES J
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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