Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus

A method is provided for placing a substrate onto a surface of a substrate holder, the surface having a plurality of burls. First substrate placement data is calculated. This data enables placement of the substrate at a certain position with respect to a position of the plurality of burls on the sur...

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Bibliographische Detailangaben

Hauptverfasser:	ALBERTI JOZEF AUGUSTINUS MARIA, SOETHOUDT ABRAHAM ALEXANDER, GROENSMIT FRANS ERIK, VAN NUNEN GERARDUS PETRUS MATTHIJS, COMPEN RENE THEODOROUS PETRUS
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHY PHYSICS
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