High Density Interconnect System Having Rapid Fabrication Cycle

An improved interconnection system and method is described, such as for connectors, socket assemblies and/or probe card systems. An exemplary system comprises a probe card interface assembly (PCIA) for establishing electrical connections to a semiconductor wafer mounted in a prober. The PCIA compris...

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Hauptverfasser: MCKAY DOUGLAS, LITZA ANNA, MODLIN DOUGLAS, KAO ANDREW, CHONG FU CHIUNG, MOK SAMMY, SWIATOWIEC FRANK JOHN, PAREKH NITIN, SHAN ZHAOHUI
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creator MCKAY DOUGLAS
LITZA ANNA
MODLIN DOUGLAS
KAO ANDREW
CHONG FU CHIUNG
MOK SAMMY
SWIATOWIEC FRANK JOHN
PAREKH NITIN
SHAN ZHAOHUI
description An improved interconnection system and method is described, such as for connectors, socket assemblies and/or probe card systems. An exemplary system comprises a probe card interface assembly (PCIA) for establishing electrical connections to a semiconductor wafer mounted in a prober. The PCIA comprises a motherboard parallel to the semiconductor wafer having an upper surface and an opposing lower planar mounting surface, a reference plane defined by a least three points located between the lower surface of the motherboard and the wafer, at least one component located below the motherboard mounting surface, and a mechanism for adjusting the planarity of the reference plane with respect to the wafer. A probe chip having a plurality of spring probes extending there from is mountable and demountable from the PCIA, without the need for further planarity adjustment. The interconnection structures and methods preferably provide improved fabrication cycles.
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subjects CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
PRINTED CIRCUITS
TESTING
title High Density Interconnect System Having Rapid Fabrication Cycle
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