Methods for compensating parameters of operating accelerometer for temperature variations

A method is disclosed in this invention for compensating a temperature dependent variation of an offset Voffset and sensitivity Vsensitivity parameters of an accelerometer. The method includes steps of a) Measuring a Sensitivity Vsensitivity(T0) and an Offset Voffset(T0) at a room temperature T0 to input to a microprocessor to calculate two tilt angles theta1 and theta2 in placing the accelerometer in a furnace for adjusting a controllable temperature therein; b) Keeping the accelerometer at the fixed tilt angle theta1 and adjusting the temperature of the furnace for measuring an output voltage at theta1 Vo(T, theta1) and keeping the accelerometer at another fixed tilt angle theta2 and adjusting the temperature of the furnace for measuring an output voltage at theta2 Vo(T, theta2); and c) solving equations to obtain the offset Voffset and sensitivity Vsensitivity parameters at different temperatures and storing these parameters in the microprocessor.