Cooling Hot-Spots by Lateral Active Heat Transport

An apparatus includes a thermoelectric cooler adjacent to a surface of a device substrate and including a first set of one or more metal electrodes, a second set of one or more metal electrodes, and one or more semiconductor members. Each member includes a material different from the device substrat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HODES MARC SCOTT, KRISHNAN SHANKAR
Format: Patent
Sprache:eng
Schlagworte:
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