Method of fabricating semiconductor device having silicide layer and semiconductor device fabricated thereby

A method of fabricating a semiconductor device having a silicide layer and a semiconductor device fabricated by the method are provided. The method may involve providing a semiconductor substrate having an active region and a field region, and forming a plurality of gate patterns on each of the acti...

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Hauptverfasser: BAE SU-GON, YOUN KI-SEOG, AHN JONG-HYON
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Sprache:eng
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creator BAE SU-GON
YOUN KI-SEOG
AHN JONG-HYON
description A method of fabricating a semiconductor device having a silicide layer and a semiconductor device fabricated by the method are provided. The method may involve providing a semiconductor substrate having an active region and a field region, and forming a plurality of gate patterns on each of the active region and the field region. The plurality of gate patterns may each have a sidewall spacer. The plurality of gate patterns on the field region include at least two adjacent gate patterns. The method may involve forming a silicide blocking layer pattern that masks a portion of the field region that exists between each of the adjacent gate patterns on the field region. The method may also involve forming a silicide layer on the active region and any of the plurality of the gate patterns that are not masked by the silicide blocking layer pattern.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method of fabricating semiconductor device having silicide layer and semiconductor device fabricated thereby
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