SEMICONDUCTOR STRUCTURE INCLUDING MIXED RARE EARTH OXIDE FORMED ON SILICON

A method (and resultant structure) of forming a semiconductor structure, includes forming a mixed rare earth oxide on silicon. The mixed rare earth oxide is lattice-matched to silicon.

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Bibliographische Detailangaben
Hauptverfasser: GUHA SUPRATIK, BOJARCZUK, JR. NESTOR ALEXANDER, BUCHANAN DOUGLAS ANDREW, NARAYANAN VIJAY, RAGNARSSON LARS-AKE
Format: Patent
Sprache:eng
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