METHOD AND APPARATUS FOR FABRICATING HIGH TENSILE STRESS FILM

A method and an apparatus for fabricating a high tensile stress film includes providing a substrate, forming a poly stressor on the substrate, and performing an ultra violet rapid thermal process (UVRTP) for curing the poly stressor and adjusting its tensile stress status, thus the poly stressor ser...

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Bibliographische Detailangaben

Hauptverfasser:	TSAI TENGUN, LIAO HSIU-LIEN, CHEN NENG-KUO, CHEN YI-WEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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