CHARGED PARTICLE DETECTOR AND DETECTING APPARATUS UTILIZING THE SAME

In a charged particle detector, the vacuum barrier can be reduced in size and a multichannel configuration is possible. A charged particle detector includes a metallic frame having one or more holes formed therein, a light transmitting member fixed in each of the holes of the metallic frame, an inor...

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Bibliographische Detailangaben
Hauptverfasser: KAWAKUBO YUKIO, AOKI MANABU, TAKEUCHI KAZUHIRO, MATSUMOTO MASAKI, TADOKORO TAKAHIRO
Format: Patent
Sprache:eng
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