Selective Optical Proximity Layout Design Data Correction

After layout design data has been modified using an OPC process, a repair flow is initiated. This repair flow includes analyzing the modified data to identify any remaining or new potential print errors in the layout data. Regions then are formed around the identified potential print errors, and a s...

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Bibliographische Detailangaben

Hauptverfasser:	COBB NICHOLAS B, WORD JAMES C, DUDAU DRAGOS S
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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