SEMICONDUCTOR DEVICE INCLUDING AN EMBEDDED CONTACT PLUG

A semiconductor device includes an active area isolated by an isolation area on a semiconductor substrate. A transistor includes a gate electrode extending across the active area, source/drain regions formed in the active area on both sides of the gate electrode, and impurity-containing contact plug...

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1. Verfasser:	IIJIMA SHINPEI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
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creator	IIJIMA SHINPEI
description	A semiconductor device includes an active area isolated by an isolation area on a semiconductor substrate. A transistor includes a gate electrode extending across the active area, source/drain regions formed in the active area on both sides of the gate electrode, and impurity-containing contact plugs connected to the source/drain regions. The source/drain regions are formed by thermal diffusion of impurities from the impurity-containing contact plugs toward the active area,
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subjects	ELECTRICITY
title	SEMICONDUCTOR DEVICE INCLUDING AN EMBEDDED CONTACT PLUG
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