SYSTEM AND METHOD FOR DETECTING THE DISPLACEMENT OF A PLURALITY OF MICRO- AND NANOMECHANICAL ELEMENTS, SUCH AS MICRO-CANTILEVERS

The invention relates to a system and method for detecting the displacement, such as the deflection, of a plurality of elements ( 1 ), such as microcantilevers, forming part of an array ( 2 ), by emitting a light beam ( 4 ) towards the array ( 2 ) and by receiving a reflected light beam on an optica...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LECHUGA GOMEZ LAURA M, TAMAYO DE MIGUEL FRANCISCO JAVIER, ALVAREZ SANCHEZ MAR
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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