SYSTEM FOR DECHARGING A WAFER OR SUBSTRATE AFTER DECHUCKING FROM AN ELECTROSTATIC CHUCK

A system for decharging a wafer or substrate disposed on an electrostatic chuck, includes a capacitance detector for measuring a capacitance between the electrostatic chuck and the wafer or substrate, and a decharging voltage calculator for calculating a decharging voltage based at least in part on...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HSU YEN-HSIANG, TSAY JENG-YANN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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