METHOD FOR FABRICATING CAPACITOR

A method for fabricating a capacitor includes firstly providing a substrate. A doped first dielectric layer and an undoped second dielectric layer are then formed on the substrate sequentially. Next, many trenches are formed in the first and the second dielectric layers. Afterwards, an ion implantat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHUANG HUI-LING, YEH HSING-WU, LEE CHENG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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