EFFICIENT METHODOLOGY FOR THE ACCURATE GENERATION OF CUSTOMIZED COMPACT MODEL PARAMETERS FROM ELECTRICAL TEST DATA

Disclosed herein are embodiments of an automated, fast and efficient method of generating a customized compact model that represents a semiconductor device at the chip, wafer or multi-wafer level in a specific manufacturing environment. Specifically, measurement data is collected from a specific man...

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Bibliographische Detailangaben
Hauptverfasser: NOWAK EDWARD J, SPRINGER SCOTT K, LOO SIM Y, NA MYUNG-HEE, LOVEJOY STEVEN G
Format: Patent
Sprache:eng
Schlagworte:
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