DIAPHRAGM VACUUM MEASURING CELL AND METHOD FOR THE PRODUCTION OF SUCH MEASURING CELL
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the margin region with a joining means ( 3 ), and that on the other side of the diaphragm ( 2 ) at a spacing...
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| creator | STRIETZEL CARSTEN BERNER WALTER BJORKMAN PER |
| description | Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the margin region with a joining means ( 3 ), and that on the other side of the diaphragm ( 2 ) at a spacing a second housing plate ( 4 ) is disposed sealing in the margin region with a joining means ( 3 ), and that the second housing plate ( 4 ) has an opening at which a connection means ( 5 ) is disposed sealing with joining means ( 3 ) for the connection of the measuring cell ( 8 ) with the medium to be measured, wherein the diaphragm ( 2 ) and the two housing plates ( 1, 4 ) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber ( 64 ), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber ( 9 ) and the opening with the connection means ( 5 ) is covered with a protective layer ( 13 ) such that at least the joining means ( 3 ) for the diaphragm ( 2 ) is protectively covered against corrosion. |
| format | Patent |
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Using an ALD method, the measuring cell is coated in a vacuum chamber ( 64 ), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber ( 9 ) and the opening with the connection means ( 5 ) is covered with a protective layer ( 13 ) such that at least the joining means ( 3 ) for the diaphragm ( 2 ) is protectively covered against corrosion.</description><language>eng</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; TESTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080515&DB=EPODOC&CC=US&NR=2008110269A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080515&DB=EPODOC&CC=US&NR=2008110269A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>STRIETZEL CARSTEN</creatorcontrib><creatorcontrib>BERNER WALTER</creatorcontrib><creatorcontrib>BJORKMAN PER</creatorcontrib><title>DIAPHRAGM VACUUM MEASURING CELL AND METHOD FOR THE PRODUCTION OF SUCH MEASURING CELL</title><description>Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the margin region with a joining means ( 3 ), and that on the other side of the diaphragm ( 2 ) at a spacing a second housing plate ( 4 ) is disposed sealing in the margin region with a joining means ( 3 ), and that the second housing plate ( 4 ) has an opening at which a connection means ( 5 ) is disposed sealing with joining means ( 3 ) for the connection of the measuring cell ( 8 ) with the medium to be measured, wherein the diaphragm ( 2 ) and the two housing plates ( 1, 4 ) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber ( 64 ), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber ( 9 ) and the opening with the connection means ( 5 ) is covered with a protective layer ( 13 ) such that at least the joining means ( 3 ) for the diaphragm ( 2 ) is protectively covered against corrosion.</description><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAhx8XQM8AhydPdVCHN0Dg31VfB1dQwODfL0c1dwdvXxUXD0cwEKhXj4uyi4-QcphHi4KgQE-buEOod4-vsp-LspBIc6e6Bp4mFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8aHBRgYGFoaGBkZmlo6GxsSpAgDNKzDI</recordid><startdate>20080515</startdate><enddate>20080515</enddate><creator>STRIETZEL CARSTEN</creator><creator>BERNER WALTER</creator><creator>BJORKMAN PER</creator><scope>EVB</scope></search><sort><creationdate>20080515</creationdate><title>DIAPHRAGM VACUUM MEASURING CELL AND METHOD FOR THE PRODUCTION OF SUCH MEASURING CELL</title><author>STRIETZEL CARSTEN ; BERNER WALTER ; BJORKMAN PER</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2008110269A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>STRIETZEL CARSTEN</creatorcontrib><creatorcontrib>BERNER WALTER</creatorcontrib><creatorcontrib>BJORKMAN PER</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>STRIETZEL CARSTEN</au><au>BERNER WALTER</au><au>BJORKMAN PER</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>DIAPHRAGM VACUUM MEASURING CELL AND METHOD FOR THE PRODUCTION OF SUCH MEASURING CELL</title><date>2008-05-15</date><risdate>2008</risdate><abstract>Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the margin region with a joining means ( 3 ), and that on the other side of the diaphragm ( 2 ) at a spacing a second housing plate ( 4 ) is disposed sealing in the margin region with a joining means ( 3 ), and that the second housing plate ( 4 ) has an opening at which a connection means ( 5 ) is disposed sealing with joining means ( 3 ) for the connection of the measuring cell ( 8 ) with the medium to be measured, wherein the diaphragm ( 2 ) and the two housing plates ( 1, 4 ) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber ( 64 ), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber ( 9 ) and the opening with the connection means ( 5 ) is covered with a protective layer ( 13 ) such that at least the joining means ( 3 ) for the diaphragm ( 2 ) is protectively covered against corrosion.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING |
| title | DIAPHRAGM VACUUM MEASURING CELL AND METHOD FOR THE PRODUCTION OF SUCH MEASURING CELL |
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