Design Structure for a Metal Fill Region of a Semiconductor Chip

A design structure embodied in a machine readable medium used in a design process includes a metal fill region of a semiconductor chip including a plurality of layer sets of the semiconductor chip, each set including a first metal fill layer, a second metal fill layer, and an insulation layer includ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WONG MANKIT, BAUMGARTNER STEVEN J, LI CHUN-TAO, STORINO SALVATORE N
Format: Patent
Sprache:eng
Schlagworte:
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