Pumping Arrangement

A differentially pumped system comprises a plurality of pressure chambers; and a pumping arrangement ( 100 ) attached thereto for evacuating the chambers, the pumping arrangement comprising first and second compound pumps ( 102, 104 ) each comprising at least a first inlet ( 120 ); ( 124 ), a second...

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Bibliographische Detailangaben
1. Verfasser: STONES IAN D
Format: Patent
Sprache:eng
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