Controlling The Flow Of Vapors Sublimated From Solids

A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed by a vapor conduit to the vacuum chamber. The vapor flow rate is determined by both the temperature of t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HORSKY THOMAS N, MILGATE ROBERT W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!