Cleaning method and cleaning apparatus for porous member

A porous member cleaning method enables effective cleaning of the interior of a porous member even when it has a small pore size, a high density and a large volume. The porous member cleaning method includes: disposing a porous member in a hermetic space, and cleaning the interior of the porous memb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANDA HIROYUKI, NOMURA KAZUFUMI, MAKINO NATSUKI
Format: Patent
Sprache:eng
Schlagworte:
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