Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same
A container opening-closing apparatus 1 includes at least a dock plate 31 for supporting and positioning a container 10 capable of accommodating a plurality of semiconductor wafers 14 ; a dock-moving mechanism 30 for moving the dock plate 31 between a container transfer position and a work position...
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Format: | Patent |
Sprache: | eng |
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