Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same

A container opening-closing apparatus 1 includes at least a dock plate 31 for supporting and positioning a container 10 capable of accommodating a plurality of semiconductor wafers 14 ; a dock-moving mechanism 30 for moving the dock plate 31 between a container transfer position and a work position...

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1. Verfasser: TOYODA NORIYOSHI
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creator TOYODA NORIYOSHI
description A container opening-closing apparatus 1 includes at least a dock plate 31 for supporting and positioning a container 10 capable of accommodating a plurality of semiconductor wafers 14 ; a dock-moving mechanism 30 for moving the dock plate 31 between a container transfer position and a work position where a container door 13 is attached and detached; a port door 23 including an attaching-detaching mechanism for attaching and detaching the container door 13 and a holding mechanism for holding the container door 13 ; a port-door advancing-retracting mechanism for horizontally moving the port door 23 ; a port-door elevating mechanism for vertically moving the port door 23 with the container door 13 held thereby so as to store the container door 13 ; and a port plate 21 having an opening closed by the port door 23 , wherein the dock-moving mechanism 30 includes stop position changing means for changing the stop position of the dock plate 31 to a desired position.
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language eng
recordid cdi_epo_espacenet_US2008019804A1
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subjects BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
title Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same
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