METHOD FOR FORMING A PLATED MICROVIA INTERCONNECT

A method for forming a plated microvia interconnect. An external dielectric layer (EDL) is mounted on a substrate in direct mechanical contact with a conductive element thereon. An opening in the EDL exposes the conductive element and create a microvia in the EDL. A sidewall and bottom wall surface...

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Bibliographische Detailangaben
Hauptverfasser: JIMAREZ MIGUEL A, TYTRAN-PALOMAKI CHERYL L, MARKOVICH VOYA R, KEESLER ROSS W, RAI RAJINDER S
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for forming a plated microvia interconnect. An external dielectric layer (EDL) is mounted on a substrate in direct mechanical contact with a conductive element thereon. An opening in the EDL exposes the conductive element and create a microvia in the EDL. A sidewall and bottom wall surface of the microvia are treated to promote adhesion of copper and are plated with a layer of copper that includes a copper layer on a copper seed layer and is in direct mechanical and electrical contact with the conductive element. A wet solder paste is deposited on the layer of copper to overfill a remaining portion of the microvia. The solder paste is reflowed to form a solder bump in and over the remaining portion of the microvia to form the plated microvia interconnect. A stiffener is attached to the EDL using a first adhesive.