METHOD FOR DETECTING TIPS OF PROBES, ALIGNMENT METHOD AND STORAGE MEDIUM STORING THE METHODS, AND PROBE APPARATUS

There is provided a method for detecting a height of a tip of a probe before detecting a horizontal position of the probe tips of the probe, by using an alignment device having a first imaging unit and a second imaging unit provided at the mounting table. In the method, at a first step, a height of...

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Bibliographische Detailangaben

1. Verfasser:	KONO YOSHINAO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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