Optical metrological scale and laser-based manufacturing method therefor

A reflective metrological scale has a scale pattern of elongated side-by-side marks surrounded by reflective surface areas of a substrate, which may be a nickel-based metal alloy such as Invar(R) or Inconel(R) and may be a thin and elongated flexible tape. Each mark has a furrowed cross section and...

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Bibliographische Detailangaben
Hauptverfasser: PELSUE KURT, DODSON STUART A.II, MABBOUX PIERRE-YVES, HUNTER BRADLEY L, EHRMANN JONATHAN S, SMART DONALD V
Format: Patent
Sprache:eng
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