APPARATUS AND REACTOR FOR GENERATING AND FEEDING HIGH PURITY MOISTURE

A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for genera...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIRAO KEIJI, NARIAI TOSHIROU, OHMI TADAHIRO, TAGUCHI MASAHARU, IKEDA NOBUKAZU, MORIMOTO AKIHIRO, NAKAMURA OSAMU, MINAMI YUKIO, KAWADA KOUJI, HONIDEN TERUO, KOMEHANA KATUNORI, HIRAI TOURU
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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