Semiconductor device and a method of manufacturing the same

A semiconductor IC device which includes a circuit region and a peripheral region on a main surface of a semiconductor substrate, a first insulating film formed over the main surface, external terminals arranged in the peripheral region and formed over the first insulating film, a conductive guard r...

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Bibliographische Detailangaben
Hauptverfasser: SATO KAZUHIKO, SAHARA MASASHI, UCHIKOSHI KEN, TACHIGAMI ATSUSHI, HOTTA KATSUHIKO, SUWANAI NAOKATSU
Format: Patent
Sprache:eng
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