Electron emitting member and manufacturing method thereof, cold cathode field emission device and manufacturing method thereof

A cold cathode field emission device comprises; a cathode electrode 11 formed on a supporting member 10 , an insulating layer 12 formed on the supporting member 10 and the cathode electrode 11 , a gate electrode 13 formed on the insulating layer 12 , an opening portion 14 A, 14 B formed through the...

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Hauptverfasser: YAGI TAKAO, SHIMAMURA TOSHIKI
Format: Patent
Sprache:eng
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Zusammenfassung:A cold cathode field emission device comprises; a cathode electrode 11 formed on a supporting member 10 , an insulating layer 12 formed on the supporting member 10 and the cathode electrode 11 , a gate electrode 13 formed on the insulating layer 12 , an opening portion 14 A, 14 B formed through the gate electrode 13 and the insulating layer 12 , and an electron emitting portion 15 formed on the portion of the cathode electrode 11 positioned in the bottom portion of the opening portion 14 B, and said electron emitting portion 15 comprises a matrix, 21 and carbon nanotube structures 20 embedded in the matrix 21 in a state where the top portion of each carbon nanotube structure is projected.